Quantum photonics

[ICNN-4-06] Direct Laser Interference Patterning of Silicon Metasurfaces

*Jonas Berzins^1,2, Simonas Indrišiūnas³, Stefan Fasold¹, Olga Žukovskaja⁴, Michael Steinert¹, Paulius Gečys³, Stefan M.B. Bäumer², Frank Setzpfandt¹, Thomas Pertsch^1,5 (1. Friedrich Schiller University Jena, Germany, 2. TNO, the Netherlands, 3. Center for Physical Sciences and Technology, Lithuania, 4. Leibniz Institute of Photonic Technology Jena, Germany, 5. Fraunhofer Institute for Applied Optics and Precision Engineering, Germany)