Short Oral Session

[LDC-P-01] Optical Surface Error Compensation Based on Freeform Polynomials

*Yuan-Chieh Cheng¹, Wei-Jei Peng¹, Khaled Abou-El-Hossein², Pei-Jen Wang³, Po-Kai Chiu¹ (1. Instrument Technology Research Center (ITRC) National Applied Research Laboratories (NARLabs), 2. Precision Engineering Laboratory, Nelson Mandela Metropolitan University, 3. Department of Power Mechanical Engineering, National Tsing Hua University)