Oral Session 3

[LEDIA-3-01] Threading Dislocation Reduction of Sputter-Deposited AlN Templates for Deep-Ultraviolet Light-Emitting Device Applications

*Kenjiro Uesugi¹, Yusuke Hayashi², Kanako Shojiki³, Hideto Miyake^2,3 (1. Strategic Planning Office for Regional Revitalization, Mie University, 2. Organization for the Promotion of Regional Innovation, Mie University, 3. Graduate School of Regional Innovation Studies, )