Oral Session 8

[LEDIA-8-03] Fabrication of Transverse Quasi-Phase-Matched Polarity-Inverted Stacked AlN Waveguide by Surface-Activated Bonding and Silicon Removal

*Asahi Yamauchi¹, Syuhei Yamaguchi¹, Takuya Onodera¹, Yusuke Hayashi², Hideto Miyake², Keishi Shiomi¹, Yasufumi Fujiwara¹, Toshiki Hikosaka³, Shinya Nunoue³, Masahiro Uemukai¹, Ryuji Katayama¹ (1. The University of Osaka, 2. The University of Mie, 3. Toshiba Corporation)