Oral Session 8

[LEDIA-8-04] MOVPE Growth on Sputtered Annealed AlN Film / Nano PSS

*Yukino Iba¹, Kanako Shojiki¹, Kenjiro Uesugi², Xiao Shiyu³, Hideto Miyake^1,3 (1. Graduate School of Engineering, Mie University, 2. Organization for the Promotion of Regional Innovation, Mie University, 3. Graduate School of Regional Innovation Studies, Mie University)