[LEDIA-P-11] Fabrication of monolithic micro-LED using inductively coupled plasma etching
*Shoma Takeda1, Tomohiro Yamaguchi1, Takeyoshi Onuma1, Tokio Takahashi2, Mitsuaki Shimizu2, Tofru Honda1(1. Kogakuin University, 2. National Institute of Advanced Industrial Science and Technology)
