Poster Session

[LEDIA-P-25] Observation of dislocations in high-quality homoepitaxial AlN layers grown by HVPE on PVT-AlN substrates

*Yudai Shimizu¹, Daichi Saito¹, Nao Takekawa¹, Toru Nagashima², Reo Yamamoto², Keita Konishi¹, Bo Monemar^3,4, Yoshinao Kumagai^1,3 (1. Dept. Appl. Chem., Tokyo Univ. of Agri. and Tech., 2. Tsukuba Research Lab., Tokuyama Corporation, 3. Inst. Global Innovation Research, Tokyo Univ. of Agri. and Tech., 4. IFM, Linköping Univ.)