Short Oral Session

[LEDIA-P-03] Monte Carlo simulation of GaN MOVPE process: carbon incorporation mechanism

Satoshi Yamamoto¹, Yuto Okawachi², Pawel Kempisty^3,4,5, *Yoshihiro Kangawa^1,3,4, Kenji Shiraishi^2,4 (1. Graduate School of Engineering, Kyushu University, 2. Graduate School of Engineering, Nagoya University, 3. RIAM, Kyushu University, 4. IMaSS, Nagoya University, 5. Institute of High Pressure Physics, Polish Academy of Sciences)