OPTICS & PHOTONICS International Congress 2019

講演情報

LEDIA2019

Short Oral presentaion

Short Oral Session

2019年4月24日(水) 14:15 〜 15:17 411+412 (Pacifico Yokohama Conference Center)

14:23 〜 14:25

[LEDIA-P-05] Pulsed DC Sputtering Deposition of GaN Thin Films with Single Crystal Target for Low Impurity Concentration

*Shogo Imai1, Yuna Onishi1, Takuya Onodera1, Masayuki Imanishi1, Yusuke Mori1, Hitoshi Miura2, Nobuaki Takahashi2, Yoshio Honda3, Heajeong Cheong3, Hiroshi Amano3, Masahiro Uemukai1, Ryuji Katayama1 (1. Graduate School of Engineering, Osaka University, 2. Tokyo Electron Technology Solutions Ltd., 3. Institute of Materials, Nagoya University)