Schedule 3 2:27 PM - 2:29 PM [LEDIA-P-07] Structural and Electrical Properties of AlN Films Prepared on Sapphire Substrates with Sputtering Technique Yuya Sakurai1, *Kohei Ueno1, Kenjiro Uesugi2, Hideto Miyake2, Hiroshi Fujioka1,3 (1. The University of Tokyo, 2. Mie University, 3. JST-ACCEL)
