Short Oral Session

[LEDIA-P-08] Mg composition control of co-sputtered MgZnO thin films toward the application of deep-UV transparent electrode

*Tadayoshi Sakai¹, Maki Kushimoto¹, Manato Deki², Yoshio Honda^2,3, Hiroshi Amano^2,4,5 (1. Deptartment of Electronics, Nagoya University, 2. Institute of Materials and Systems for Sustainability, Nagoya University, 3. Institute for Advanced Research, Nagoya University, 4. Akasaki Research Center, Nagoya University, 5. Venture Business Laboratory, Nagoya University)