Short Oral Session

[LEDIA-P-11] Fabrication of monolithic micro-LED using inductively coupled plasma etching

*Shoma Takeda¹, Tomohiro Yamaguchi¹, Takeyoshi Onuma¹, Tokio Takahashi², Mitsuaki Shimizu², Tofru Honda¹ (1. Kogakuin University, 2. National Institute of Advanced Industrial Science and Technology)