Short Oral Session

[LEDIA-P-17] Dependence of surface morphology of N-polar AlN on misorientation angle of sapphire substrate

*Tatsuya Isono¹, Tatsuya Ezaki¹, Tadatoshi Ito¹, Ryota Sakamoto¹, Yongzhao Yao², Yukari Ishikawa², Narihito Okada¹, Kazuyuki Tadatomo¹ (1. Yamaguchi University, 2. JFCC)