Short Oral Session

[LEDIA-P-20] Thermodynamic Analysis of AlN Nonpolar Planes during Metalorganic Vapor Phase Epitaxy

*Tsunashi Shimizu¹, Yuki Seta¹, Abdul Muizz Pradipto¹, Toru Akiyama¹, Kohji Nakamura¹, Tomonori Ito¹ (1. Mie University)