Dmitrii Zverev1, Alexander Barannikov1, Victor Kohn2, Vyacheslav Yunkin3, Sergey Kuznetsov3, Irina Snigireva4, * Anatoly Snigirev1
(1. Immanuel Kant Baltic Federal University, 2. National Research Center “Kurchatov Institute”, 3. Institute of Microelectronics Technology RAS, 4. European Synchrotron Radiation Facility)