Session information

OPTM2020

Oral Presentation

Session 1

Tue. Apr 21, 2020 1:00 PM - 2:50 PM 211 (Conference Center)

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1:00 PM - 1:10 PM

[OPTM-OP] Opening Remarks

1:10 PM - 1:50 PM

[OPTM1-01] Annular subaperture stitching interferometry with planar reference wavefront for measurement of spherical and aspherical surfaces

*Markus Schake¹, Gerd Ehret¹ (1. Physikalisch Technische Bundesanstalt)

1:50 PM - 2:30 PM

[OPTM1-02(Invited)] Nano Optical Measurement for Next-Generation Nano/Micro Manufacturing based on Localized Light Energy Control

*Satoru Takahashi¹ (1. The University of Tokyo)

2:30 PM - 2:50 PM

[OPTM1-03] Displacement measuring interferometer using sinusoidal frequency modulation and phase-locked loop on arbitral modulation index

*Masato Higuchi¹, Dong Wei¹, Masato Aketagawa¹ (1. Nagaoka University of Technology)

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