*Kyosuke Kuramoto¹, Takuma Fujita¹, Takehiro Nishida¹, Tetsuya Yagi¹, Akira Takamori², Kazuhisa Yamamoto², Masahiko Kondow³ (1. Mitsubishi Electric Corporation, 2. Institute of Laser Engineering, Osaka University, 3. Graduate School of Engineering, Osaka University)

*Katrin Paschke¹, G. Blume¹, J. Pohl¹, B. Sumpf¹, D. Feise¹, P. Ressel¹, A. Sahm¹, N. Werner¹, J. Hofmann¹ (1. Ferdinand-Braun-Institut)

*Linhai Xu¹, Yufei Wang¹, Yufei jia¹, Wanhua Zheng¹ (1. Institute of Semiconductors, CAS)