OPTICS & PHOTONICS International Congress 2020

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ALPS2020

Oral Presentation

Short wavelength light sources and applications

Thu. Apr 23, 2020 9:00 AM - 10:30 AM 511+512 (Conference Center)

Session Chair: Hiroki Mashiko(NTT BRL)

10:15 AM - 10:30 AM

[ALPS12-04] Development of Low Firing Voltage Electrodes Structure for Hg-Free UV-LAFi

*Hitoshi Hirakawa1, Kenji Awamoto1, Takefumi Hidaka1, Junichiro Takahashi1, Tetsuya Makino1, Masayuki Wakitani1, Tsutae Shinoda2 (1. Shikoh Tech Co, Ltd., 2. Shinoda Plasma Co, Ltd.)