Schedule 0 2:30 PM - 2:45 PM [LEDIA3-03] Fabrication process of GaInN/GaN honeycomb array nanocolumn LEDs for integration of surface plasmonic resonance scheme *Akihiro Ueno1, Gyo Imamura2, Keigo Yoshida1, Keiji Takimoto2, Ichirou Nomura2, Rie Togashi2, Tomohiro Yamaguchi1, Tohru Honda1, Katsumi Kishino2 (1. Kogakuin University, 2. Sophia University)