Short Presentation

[LEDIA6-16] Thermodynamic study of (Al_xGa_1-x)₂O₃ ternary alloy growth by metalorganic vapor phase epitaxy

*Nami Tanaka¹, Saori Matsugai¹, Sakiko Yamanobe¹, Nao Takekawa¹, Ken Goto¹, Yoshinao Kumagai^1,2 (1. Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2. Institute of Global Innovation Research, Tokyo University of Agriculture and Technology)