スケジュール 0 12:03 〜 12:06 [LEDIA6-22] Growth of AlGaN films on AlN template by RF-plasma assisted molecular beam epitaxy *Mari Hashimoto1, Naozumi Tachibana1, Tohru Honda1, Tomohiro Yamaguchi1, Takeyoshi Onuma1 (1. Kogakuin University )