Poster Session

[LEDIAp-10] Thermodynamic analysis of metalorganic vapor phase epitaxy of group-III sesquioxides

*Saori Matsugai¹, Nami Tanaka¹, Sakiko Yamanobe¹, Nao Takekawa¹, Ken Goto¹, Yoshinao Kumagai^1,2 (1. Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2. Institute of Global Innovation Research, Tokyo University of Agriculture and Technology)