Schedule 0 5:10 PM - 5:30 PM [OPTM2-06] Electromagnetic simulation model of microscopic scattering dark-field imaging for optical components surface defect detection *Weimin Lou1, Pin Cao2, Haotian Hu1, Zichen Lu1, Yongying Yang1 (1. Zhejiang University, 2. Hangzhou Zernike Optical Technology Co., Ltd)
