Schedule 0 2:10 PM - 2:30 PM [OPTM5-03] Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry *Daesuk Kim1, Vamara Dembele1, Inho Choi1, Sukhyun Choi1, Saeid Kheiryzadehkhanghah1, Chung Song Kim1 (1. Chonbuk National University)
