Dispersive interference ellipsometry with line-field configuration

Jinxu Zhang

Presentation information

ALPS2024 » Oral Presentation

Optical frequency combs / Frequency stabilized lasers and applications (6)

Thu. Apr 25, 2024 4:30 PM - 5:30 PM 303 (Pacifico Yokohama Conference Center)

Session Chair: Sho Ookubo (National Institute of Advanced Industrial Science and Technology)

5:00 PM - 5:15 PM

[ALPS23-02] Dispersive interference ellipsometry with line-field configuration

*Jinxu Zhang¹, Liheng Shi¹, Lizong Dong¹, Guanhao Wu¹ (1. Tsinghua University)

We demonstrate a line-field dispersive interference ellipsometry utilizing an anisotropic crystal, measuring the birefringent phase of a quarter-wave plate and SiO₂ film thickness. This method achieves line-field distribution within just 5 ms.

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