OPTICS & PHOTONICS International Congress 2024

Presentation information

ALPS2024 » Oral Presentation

Short wavelength light sources and applications (2)

Fri. Apr 26, 2024 11:00 AM - 12:00 PM 303 (Pacifico Yokohama Conference Center)

Session Chair: Takeshi Higashiguchi (Utsunomiya Univ.)

11:30 AM - 12:00 PM

[ALPS28-02(Invited)] Soft X-Ray Laser Ablation Toward to Nanometer-Scale Depth Surface Patterning

*Masahiko Ishino1 (1. National Institutes for Quantum Science and Technology (QST))

Damage thresholds and structures on various materials induced by the soft x-ray free electron laser irradiations were evaluated. On the sapphire crystal surface, we found a novel processing structure having extremely shallow nanometer depth.

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