Short wavelength light sources and applications (2)

[ALPS28-02(Invited)] Soft X-Ray Laser Ablation Toward to Nanometer-Scale Depth Surface Patterning

*Masahiko Ishino¹ (1. National Institutes for Quantum Science and Technology (QST))

Damage thresholds and structures on various materials induced by the soft x-ray free electron laser irradiations were evaluated. On the sapphire crystal surface, we found a novel processing structure having extremely shallow nanometer depth.