OPTICS & PHOTONICS International Congress 2024

講演情報

ALPS2024 » Oral Presentation

Short wavelength light sources and applications (3)

2024年4月26日(金) 13:30 〜 15:00 303 (Pacifico Yokohama Conference Center)

Session Chair: Keisuke Kaneshima (University of Hyogo)

13:30 〜 13:45

[ALPS29-01] Ultrafast laser-driven extreme-ultraviolet sources for applications to advanced nanolithography

*THANH HUNG DINH1, Shinichi Namba2, Hiroki Yamamoto1, Noboru Hasegawa1, Masahiko Ishino1, Masaharu Nishikino1 (1. National Institutes for Quantum Science and Technology (QST), 2. Graduate School of Advanced Science and Engineering, Hiroshima University)

We develop ultrafast laser-driven EUV sources and attempt to evaluate the response of photoresist materials exposed to intense ultrashort EUV pulses, as a touchstone for the next-generation EUV-FEL lithography

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