OPTICS & PHOTONICS International Congress 2024

Presentation information

ALPS2024 » Oral Presentation

Short wavelength light sources and applications (3)

Fri. Apr 26, 2024 1:30 PM - 3:00 PM 303 (Pacifico Yokohama Conference Center)

Session Chair: Keisuke Kaneshima (University of Hyogo)

2:00 PM - 2:30 PM

[ALPS29-03(Invited)] Modelling of laser-driven EUV source plasmas for nanolithography

*John Sheil1,2, Jorge Gonzalez1,2, Stan de Lange1,2, Oscar Versolato1,2 (1. Advanced Research Center for Nanolithography (ARCNL), 2. Vrije Universiteit Amsterdam)

I will review our recent efforts in modeling laser-driven tin plasmas, specifically the atomic physics of EUV generation, radiation-hydrodynamic simulations of these plasmas as well as plasma expansion characterization.

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