OPTICS & PHOTONICS International Congress 2024

Presentation information

ALPS2024 » Poster Presentation

ALPS Poster Session 1

Wed. Apr 24, 2024 10:30 AM - 12:00 PM Hall A (Pacifico Yokohama Exhibition Hall)

[ALPSp1-03] Wavefront collection system for high-aspect-ratio nanometer hole drilling

Kanki Yoshida2, *Kyosuke Soma2, Yurina Michine1,2, Hitoki Yoneda1,2 (1. Institute for Laser Science, 2. University of Electro-Communications)

It is effective to create very high aspect ratio nanometer hole with ultra-short pulse laser. By using careful tuning of wavefront in time and space, we achieve over 100micron depth hole of 180nm hole diameter with two micro Joule pulse energy.

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