ALPS Poster Session 1

[ALPSp1-22] Joint measurement of electron density, temperature, and EUV spectrumof laser-produced tin plasma for nanolithography

*YIMING PAN¹, Kentaro Tomita¹, Atsushi Sunahara^2,3, Akira Sasaki⁴, Katsunobu Nishihara^3,5 (1. Hokkaido University, 2. Purdue University, 3. Osaka University, 4. Kansai Institute for Photon Science, National Institutes for Quantum Science, 5. Osaka Metropolitan University)

The plasma density, temperature and the emitted EUV spectra of Sn laser-produced plasmas (LPPs) was measured simultaneously, enabling the first experimental test of existing atomic model for Sn EUV source.