Transparent Ga2O3 and Gd3Ga5O12 thick films prepared by laser-assisted chemical vapor deposition and their optical properties

Terumasa Oga

[ALPSp2-01] Transparent Ga₂O₃ and Gd₃Ga₅O₁₂ thick films prepared by laser-assisted chemical vapor deposition and their optical properties

*Terumasa Oga¹, Akihiko Ito¹ (1. Yokohama National University)

Ga₂O₃ and Gd₃Ga₅O₁₂ transparent thick films were prepared on c-cut sapphire and Y₃Al₅O₁₂ single crystal substrates using laser-assisted chemical vapor deposition method, respectively.

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講演情報

ALPS Poster Session 2

[ALPSp2-01] Transparent Ga₂O₃ and Gd₃Ga₅O₁₂ thick films prepared by laser-assisted chemical vapor deposition and their optical properties

講演情報

ALPS Poster Session 2

[ALPSp2-01] Transparent Ga2O3 and Gd3Ga5O12 thick films prepared by laser-assisted chemical vapor deposition and their optical properties

[ALPSp2-01] Transparent Ga₂O₃ and Gd₃Ga₅O₁₂ thick films prepared by laser-assisted chemical vapor deposition and their optical properties