ALPS Poster Session 2

[ALPSp2-11] Measurement of Sn ion energy spectrum and estimation of Sn cloud density distribution for lifetime improvement of collector mirror in EUV light source

*Yoshiyuki Honda¹, Shinji Nagai¹, Tomoyoshi Toida¹, Hirokazu Hosoda¹, Takeru Niinuma², Masaki Kume², Hiroki Morita², Takeshi Higashiguchi² (1. Gigaphoton Inc., 2. Utsunomiya Univ.)

We measured the Sn ion energy spectrum and estimated of Sn cloud density distribution. It was estimated that high density Sn remained in the Sn cloud regardless of Sn DL size or Sn cloud size.