ALPS Poster Session 2

[ALPSp2-12] Characteristics of high-energy ion debris from a laser-produced Gd plasma B-EUV source

Takeru Niinuma¹, Masaki Kume¹, Tsukasa Sugiura¹, Hiroki Morita¹, Shinichi Namba², *Takeshi Higashiguchi¹ (1. Utsunomiya University, 2. Hiroshima University)

A laser-produced Gd plasma has been proposed as a next generation of lithography light source (B-EUV source). We observed the charge-separated energy spectra and the angular distribution of high-energy ion debris from a B-EUV source.