ALPS Poster Session 2

[ALPSp2-13] EUV conversion efficiency of multiple laser irradiation

*Tsukasa Sugiura¹, Hayato Yazawa¹, Hiroki Morita¹, Shinichi Namba², Takeshi Higashiguchi¹ (1. Utsunomiya University, 2. Hiroshima University)

The conversion efficiency of EUV was measured when irradiating each of the lasers from one to five lasers. When multiple lasers were irradiated, the conversion efficiency increased more than only one laser irradiation.