Light sources and components 1

[LDC3-02(Invited)] Fabrication of Stacked RGB Monolithic GaInN-based μLED Arrays with Tunnel Junctions and Challenges for display Applications

*Motoaki Iwaya¹, Tatsunari Saito¹, Yoshinobu Suehiro¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Daisuke Iida², Kazuhiro Ohkawa² (1. Meijo University, 2. King Abdullah University of Science and Technology (KAUST))

We have proposed a method of forming tunnel junction layers between RGB devices by crystal growth and electrodes on etched n-type layers, and fabricated stacked monolithic RGB full-color μLED arrays.