Short Presentation

[LEDIA-SP-17] Homoepitaxial regrowth of AlGaN on chemically mechanically polished AlGaN templates and its application to UV B laser diodes

*R. Yamada¹, R. Kondo¹, T. Nishibayashi¹, Y. Imoto¹, T. Saito¹, S. Maruyama¹, R. Miyake¹, Y. Sasaki¹, S. Iwayama¹, M. Iwaya¹, T. Takeuchi¹, S. Kamiyama¹, H. Miyake² (1. Meijo Univ., 2. Mie Univ.)

A chemically mechanically polishing of AlGaN was investigated. AlGaN was re grown on the polished templates and applied to UV B laser diodes. This method had a clear effect of reducing hillock and successfully achieved oscillation at RT