Session 5

[OPTM5-02] Development of shadow moiré-based measurement technique for ceramic substrate surface topography measurement

HUNGLIN HSIEH¹, *HAOWEN CHIA¹, YUCHENG YANG¹ (1. National Taiwan University of Science and Technology)

A shadow moiré technique for surface topography measurement is proposed. The proposed technique is developed based on the shadow moiré theory and the fast Fourier transform method, possessing advantages of large area and high resolution.