OPTM Poster Session

[OPTMp-03] Discussion on measurement uncertainty used in laser interference measurement of annular end face of workpieces

Hsiao-Yu Chou¹, Hui-Jean Kuo¹, Chao-Te Lee¹, Jung-Ru Yu¹, *Chien-Yao Huang¹ (1. Taiwan Instrument Research Institute, National Applied Research Laboratories)

This article discusses the allowable range changes and industrial applications caused by introducing measurement uncertainty based on the data obtained from 2528 pieces of wafer moving mechanism ejector pins inspected with laser interferometry technology.