OPTM Poster Session

[OPTMp-10] Development of Smart Spindle Applied for Brittle Materials Polish

Rou-Jhen Chen¹, Yi-Cheng Lin¹, Ray-Ching Hong¹, Shiau-Cheng Shiu², Ruei-Feng Tsai³, Chun-Wei Liu², *Wen-Tse Hsiao¹ (1. Taiwan Instrument Research Institute National Applied Research Laboratories, , 2. Department of Power Mechanical Engineering, National Tsing Hua University, 3. WINDIRS TECHNOLOGY CO.LTD.)

In the view of this, this study to develop a sensing polishing head and a sensing polishing spindle as the smart aerostatic spindle for use in the optical component polishing process.