Ultrashort Pulsed Laser Processing

[SLPC3-02] Fabrication of diffraction gratings in glass and in-process monitoring of its diffraction beam

Yuta Nakamura¹, Satoshi Hasegawa¹, *Yoshio Hayasaki¹ (1. Utsunomiya University)

We developed a holographic laser processing machine with the performance monitoring of a target fabrication. The machine also had a rotating stage for the change of the beam parameters over a long period of time.