Ultrashort Pulsed Laser Processing

[SLPC3-04] Stable LIPSS formation on transparent materials by data-driven ultrashort pulse laser processing based on optical in-process monitoring

*Aiko Narazaki¹, Daisuke Nagai^1,2, Takemichi Miyoshi^1,2, Hideyuki Takada¹, Dai Yoshitomi¹, Godai Miyaji² (1. National Institute of Advanced Industrial Science and Technology (AIST), 2. Tokyo Univ of Agriculture and Technology)

We have developed a data-driven USP laser processing by feedback control of the laser intensity based on a novel optical in-process monitoring toward stable LIPSS formation on transparent materials like glasses.