Ultrashort Pulsed Laser Processing

[SLPC3-06] On-Machine Measurement Using Optical Interferometry in Holographic Laser Processing

*Ren Umetsu¹, Yoshio Hayasaki¹, Satoshi Hasegawa¹ (1. Utsunomiya University)

In general, finding the optimal laser irradiation conditions to obtain the desired structure requires a lot of trial and error for even the most skilled laser operator. In this study, on-machine measurement of the processed structure was proposed for efficient search of laser irradiation conditions.