NA Dependence of Micro-vias drilling on glass Using 248nm Excimer Laser

Tomonari Tanaka

Presentation information

SLPC2024 » Oral Presentation

Micro Nano Processing 3

Wed. Apr 24, 2024 10:30 AM - 12:00 PM 416+417 (Pacifico Yokohama Conference Center)

Session Chair: Godai Miyaji (Tokyo University of Agriculture and Technology), Mizue Mizoshiri (Nagaoka University of Technology)

11:15 AM - 11:30 AM

[SLPC6-03] NA Dependence of Micro-vias drilling on glass Using 248nm Excimer Laser

*Tomonari Tanaka¹, Akira Suwa¹, Yasuhiro Adachi¹, Yasufumi Kawasuji¹, Masakazu Washio² (1. Gigaphoton Inc., 2. Waseda University)

To understand the high aspect micro-via fabrication mechanism, we report results of the relationship between the Numerical Aperture (NA) of the KrF excimer laser irradiation and the micro-vias depth.

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