AI / CPS Laser Processing

[SLPC8-02] Deep Learning Model to Determine Laser Irradiation Conditions for the Formation of Nano-Periodic Structure

*Ryouta Masuda¹, Yoshio Hayasaki¹, Satoshi Hasegawa¹ (1. Center for Optical Research and Education, Utsunomiya University)

In this study, we constructed a deep learning model predicting scanning electron microscope (SEM) images of nano-periodic structures on silicon substrates corresponding to selected laser irradiation conditions. This learning model enables us to estimate the nano-periodic structures before the processing, which aids in rapid optimization of the laser irradiation conditions.