SLPC Poster Session

[SLPCp-04] Size effect of SiC nanoparticles on SiC patterning properties in green femtosecond laser direct writing

*Kairi Nishisaka¹, Amarsaikhan Khaliun¹, Masashi Watanabe², Yoshiyuki Imai², Shohei Ueta², Xing Yan², Mizue Mizoshiri¹ (1. Nagaoka University of Technology, 2. Japan Atomic Energy Agency)

The size effect of SiC nanoparticles on femtosecond laser SiC patterning was investigated using different sizes of SiC nanoparticles. Finer particles with ~18 nm in diameter achieved the high resolution and less oxidization.