SLPC Poster Session

[SLPCp-11] Femtosecond laser processing of polyimide

*Masaki Uematsu¹, Saulius Juodkazis², Vygantas Mizeikis¹ (1. Shizuoka University, 2. Swinburne University of Technology)

We report on microfabrication of polyimide using femtosecond laser pulses, and describe the obtained modification of its structural, optical, electrical, and thermal properties of PI. The main processes addressed are fs laser-induced carbonization of polyimide and generation of laser-induced periodic surface structures (LIPSS). Application of these modifications for the fabrication of optical, electronic and thermal devices will be outlined.