SLPC Poster Session

[SLPCp-20] Nano Dot Structures on the Surface of Si Solar Cells Produced by XeCl and KrF Excimer Laser Pulses

*Mitsuhiro Kusaba¹, Kenta Hirai¹, Tomoyo Tanaka¹, Daisuke Tsutsumi¹, Masaki Hashida^2,3, Hitoshi Sakagami⁴ (1. Osaka Sangyo University, 2. Tokai University, 3. Kyoto Univeristy, 4. National Institute for Fusion Science)

When a silicon solar cell was irradiated with KrF excimer laser with laser fluences lower than the melting threshold, nanodot structures with a height of less than 100 nm were formed.