Optics + Company

[XOPT4-06] High Efficiency X-ray Optics for Laboratory Instrumentation and Applications

*Tomomi Ogaki¹, Wenbing Yun², Sylvia JY Lewis², SH Lau² (1. Canon Marketing Japan, Inc., 2. Sigray, Inc.)

The optics produced by Sigray include ellipsoidal or paraboloidal designs with single or double bounce to direct the x-ray beam on to the sample. As an application of semiconductor device, the x-ray assisted device alteration (XADA) system has been developed by the double paraboloidal mirror lens and the highbrightness x-ray microbeam system. In this study, we report the recent results by the ellipsoidal and the double paraboloidal mirror lens.