Mirror

[XOPT5-01(Invited)] Removal of systematic errors in metrology for ultra-accurate x-ray mirrors

*Josep Nicolas¹, Albert Van Eeckhout¹, Igors Sics¹, Dominique Heinis¹ (1. ALBA Synchrotron Light Source)

We present numerical methods for the data analysis of metrology insturments like NOM and stitching interferometers, aimed at removing the systematic errors that limit their accuracy. We analyze the methods and provide experimental results.